Phase Formation in Ion Beam Bombarded Al–Au Multilayers using High-current 2.0 MeV 4He‘ Ions
نویسندگان
چکیده
High-current ion beam bombardment (IBB) was performed to interdi†use Al–Au multilayers produced by evaporation on Ñat substrates of carbon, silicon and gold (typical thickness of each layer 150 nm, packages consist of 2 and 2.5 periods). During IBB with 2 MeV 4He‘ ions, the Al–Au interdi†usion was measured simultaneously with Rutherford backscattering (RBS). A complete mixing of the multilayers close to the surface is achieved within a few minutes and observed by variations in the Al–Au ratios. X-ray di†raction (XRD) was used to study the phase formation in detail. In as-deposited specimens only the reÑections of both metals are detected, whereas after IBB the main intermetallic phase is Small amounts of further Al–Au phases are observed additionally in depenAlAu 2 . dence on the substrate type. It was deduced from complementary RBS and XRD analyses that intermixing in such multilayered systems is thermally dominated. 1998 John Wiley & Sons, Ltd. (
منابع مشابه
X-ray re ̄ectivity investigation of near-surface density changes induced in Al±Au multilayers by high-current ion beam bombardment
Alternating Al±Au multilayers (typical thickness of each layer 150 nm) were deposited on polished glassy carbon substrates by evaporation under high-vacuum conditions at 278 K and subsequently interdiused with high-current 2.0 MeV 4He ions. After ion beam bombardment, non-destructive X-ray re ̄ectometry measurements reveal a signi®cant decrease of the density in the near-surface region from 19...
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